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110 Series Vacuum Rated Servo Motors with Wire Clamp Covers
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110 Series Vacuum Rated Servo Motors with Wire Clamp Covers

  • Wheatstone

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Product Description

Vacuum Rated Servo Motors

Product Overview

The WHEATSTONE Vacuum Rated Servo Motors is designed to deliver precise motion control and long-term reliability in high-vacuum (HV) and ultra-high-vacuum (UHV) environments. Standard motors are unsuitable for vacuum due to outgassing, lubrication issues, and thermal stress. By incorporating low-outgassing materials, vacuum-rated insulation, and specialized cooling solutions, this motor achieves stable operation in the most demanding scientific, aerospace, and industrial applications.

Key Features

  • Vacuum Compatibility – Manufactured from low-outgassing metals, ceramics, and polymers to minimize contamination in vacuum chambers.

  • High Precision – Closed-loop servo design ensures accurate positioning and smooth motion control.

  • Thermal Management – Optimized for heat dissipation in vacuum, with options for conduction or radiation cooling.

  • Lubrication System – Utilizes solid lubricants or vacuum-compatible coatings to ensure durability without outgassing.


  • Customization Options – Available with custom windings, feedback devices, and housing designs for specialized integration.

  • Long Service Life – Designed to withstand continuous operation in UHV and cryogenic conditions.

Technical Highlights

  • Motor Type: Vacuum-Compatible Servo Motor

  • Frame Sizes: Available from 40 mm to 180 mm series

  • Control: Closed-loop with encoder feedback

  • Insulation: Vacuum-rated, low-outgassing insulation system

  • Torque Output: High torque-to-size ratio, customizable

  • Operating Pressure: 10-7 pa (application dependent)

  • Temperature Range: -196°C to +200°C (custom versions available)

  • Cooling Methods: Conduction or radiation cooling; optional liquid cooling jackets

  • Applications: Space technology, satellite systems, semiconductor equipment, vacuum robotics, particle accelerators, and research laboratories

    Motor Dimensions


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Electrical Parameters

Servo Motor Series 1800W
Rated Voltage(V)
220 380
Motor Pole Pairs
5
Rated Power(W)
1800
Rated Torque(NM)
6.88
Rated Speed(RPM)
2500
Rated Current(A)
7.5 4.5
Maximum Torque(NM)
20.63
Maximum Current(A)
0.85 48.97
Maximum Speed(RPM)
3000
Wire Resistance(Ω)
0.85 48.97
Wire Inductance(mH)
10.3 125.2
Counter-EMF(V/Krpm)
57.11
114
Moment of Inertia
(Kg.cm2)
No brakes
5.458
Has brakes
5.977
Motor Feedback Methods
Optional: Resolver feedback, Hall effect, incremental, and multiturn absolute encoders
Motor Insulation Class
F
Motor Protection Rating
IP54(Excludes shaft ends)
Weight(Kg)
No brakes
6.3
Has brakes
7.2
Vacuum Environment
Resolver feedback: 1×10⁻⁷ Pa; other encoders: maximum 1×10⁻⁴ Pa
Work Environment
Resolver feedback: -196°C to +200°C; other encoders: -40°C to +105°C


Application Industry

1.Semiconductor and Electronics Manufacturing

In core processes such as wafer handling, lithography, and coating, we provide oil-free, particle-free precision motion control to ensure high yield and reliability in chip manufacturing.

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2.Scientific Research and State-of-the-Art Instruments

In equipment such as electron microscopes, surface analyzers, and particle accelerators, these systems meet the demanding requirements for ultra-high vacuum and nanometer-level positioning accuracy.

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3.Automation in Extreme Environments

Suitable for industrial applications involving high temperatures (up to 300°C), cryogenic temperatures (as low as -196°C), or intense radiation, such as nuclear industry equipment, wind tunnel testing, and vacuum welding.

jimeng-2026-08-17-8629-真空焊接

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