| Vacuum Rated Levels | Z1 = Low Vacuum 105~102 Pa | Z2 = Medium Vacuum 102~10-1 Pa |
| Z3 = High Vacuum 10-1~10-5 Pa | Z4 = Ultra-High Vacuum <10-5 Pa |
Overcoming heat dissipation challenges: whilst conventional motors rely on air convection for cooling, vacuum motors reduce their own heat generation by utilising high-temperature-resistant materials and optimising their electromagnetic design;Preventing vacuum contamination: in a vacuum, gas molecules within conventional materials can escape, contaminating the vacuum environment and affecting precision processes.
When used in conjunction with high-resolution encoders, it achieves repeatability and positioning accuracy at the micrometre or even nanometre level, with minimal speed fluctuations, meeting the precision requirements of applications such as semiconductor handling and lithography alignment.
Wide temperature range and high reliability
Supports extreme temperature cycling from -196°C to +200°C; features a radiation-resistant design; optimised for heat dissipation via conduction and radiation in a vacuum environment where convective cooling is absent; offers a service life of tens of thousands of hours without failure.
| Base Size | Power Range | Speed Range | Voltage Range |
|---|---|---|---|
| 40mm | 0.05~0.1KW | 3000~4000rpm, Customized | 24V,48V,220V |
| 60mm | 0.4KW | 3000~4000rpm,Customized | 24V,48V,220V,380V |
| 80mm | 0.75~1KW | 3000~4000rpm,Customized | 48V,220V,380V |
| 110mm | 1.8KW | 2500~3000rpm,Customized | 220V, 380V |
| 130mm | 2.6~3.8KW | 2500~3000rpm,Customized | 220V, 380V |
| 180mm | 5.5KW | 2000~3000rpm,Customized | 220V |
Edge-sealing Structure
Aviation Connector Type
| Name | Size | Category | Thumbnail | Download |
|---|---|---|---|---|
| Explosion Proof Servo Motor Technical Data.pdf | 89KB | Catalogue | | Download |

Quality

Reliability

Innovation

Customization

Experience

Global Reach

Commitment to Service

Cost-effectiveness