Vacuum Servo Motor

Vacuum servo motor is a specially designed servo motor that can operate reliably in vacuum or low-pressure environments, where conventional motors would fail due to outgassing, overheating, or lubrication issues. It combines precise servo control (position, speed, and torque) with vacuum-compatible materials, insulation, and structural design.

Vacuum servo motors are widely used in semiconductor manufacturing, vacuum chambers, space simulation systems, aerospace testing, scientific instruments, and high-end automation equipment.

1.Vacuum-Compatible Design

2.High Precision and Dynamic Control

3.Excellent Thermal Management

4.Reliable Operation in Extreme Conditions

5.Clean and Maintenance-Free Operation

Vacuum servo motors are required in environments where precise motion control must be maintained under vacuum or low-pressure conditions, and where standard motors cannot operate reliably:

Environments That Require Vacuum Servo Motors

1. Vacuum Chambers Used in semiconductor, coating, and research systems where air must be removed to avoid contamination or oxidation.
Vacuum servo motors provide accurate positioning and repeatable motion inside or across vacuum chambers.

2.Semiconductor and Flat Panel Display Manufacturing Processes such as wafer handling, lithography, etching, and deposition operate under medium to ultra-high vacuum.Vacuum servo motors are essential for high precision, cleanliness, and continuous operation.

3.Space Simulation and Aerospace Testing Space simulation chambers replicate outer space vacuum and thermal conditions.Vacuum servo motors are used in mechanism actuation, alignment systems, and test platforms.

4.Scientific Research and Laboratory Equipment Particle accelerators, electron microscopes, and vacuum spectroscopy systems require stable, low-vibration, contamination-free motion control.

5.Vacuum Coating and Thin-Film Deposition Systems Processes such as PVD, CVD, and sputtering rely on vacuum conditions.Vacuum servo motors drive substrate rotation, linear stages, and robotic arms with high accuracy.

6.Medical and Pharmaceutical Vacuum Systems Certain sterilization, imaging, and analytical devices operate under controlled vacuum environments, requiring clean and precise motor control.

7.High-End Vacuum Automation and Robotics Vacuum-compatible robotic arms and transfer systems need fast response, smooth motion, and precise control without compromising vacuum quality.

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Vacuum Servo Motor Features

Vacuum-Compatible Design;
High-Precision Servo Control;
Low Outgassing Materials;
Oil-Free or Vacuum-Grade Lubrication;
Conduction-Based Thermal Management;
Clean and Particle-Free Operation;
High Reliability and Long Service Life;
Compact and Customizable Design;
Compatibility with Harsh Environments.

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Benefits of Vacuum Servo Motors

Vacuum servo motors incorporate several key features and components that enable them to operate safely and efficiently in hazardous environments. Let us delve into several of these core elements.

Reliable Performance in Vacuum Environments

Specifically engineered for low to ultra-high vacuum conditions, vacuum servo motors operate reliably where conventional motors fail due to outgassing, lubrication loss, or insufficient cooling.

High Precision and Accurate Motion Control

Closed-loop servo control provides precise positioning, smooth speed regulation, and stable torque output, making them ideal for high-accuracy and repeatable motion applications.

Ultra-Clean and Low Contamination Operation

Low-outgassing materials and oil-free or vacuum-compatible lubrication prevent particle generation and contamination, ensuring clean operation in sensitive environments.

Long Service Life and High Reliability

Optimized thermal management and robust design enable continuous operation, reduced maintenance, and long-term reliability even under extreme vacuum conditions.

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Vacuum Servo Motor Technical Data

Base Size	Rated Power	Rated Speed	Rated Voltage	Vacuum level
40mm	0.1kw	3000,Customized	220V	10²pa~10^-1pa
60mm	0.4kw	3000,Customized	220V	10²pa~10^-1pa
80mm	0.5kw~0.75kw	3000, Customized	48V, 220V	10⁵pa~10²pa
110mm	2.2kw	3500rpm,Customized	220V, 380V	10⁵pa~10²pa
130mm	1.2kw~4.5kw	3000rpm, Customized	220V, 380V	10⁵pa~10²pa
150mm	3.7kw~8.8kw	3000rpm,Customized	220V, 380V	10⁵pa~10²pa
180mm	6kw~11kw	3000rpm,Customized	220V, 380V	10⁵pa~10²pa
220mm	10.8kw~14.3kw	3000rpm,Customized	220V, 380V	10⁵pa~10²pa,<10^-5pa

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Wheastone Explosion Servo Motor Mode of Connection

Lead Cable Type

For Zone 1,2

Explosion-proof Aviation Connector Type

For Zone 2

Terminal Type

For Zone 1,2

Wheatstone Explosion Proof Servo Motor

Vacuum Servo Motor

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Wheatstone Vacuum servo motor Catalogue

Name	Size	Category	Thumbnail	Download
Radiation hardened motors.pdf	12.73MB	Catalogue		Download

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If there is anything you're not sure about or you just need a hand getting set-up you can call or email us.

About Wheatstone:Your Expert Of Vacuum Servo Motor

Wheatstone is your expert in vacuum servo motor solutions, specializing in high-precision motion control for vacuum and extreme environments.

With deep engineering expertise and a focus on reliability, Wheatstone delivers vacuum servo motors designed for semiconductor equipment, aerospace testing, scientific research, and advanced automation.

Our solutions combine low-outgassing design, precise servo control, and long-term stability to meet the most demanding applications.

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Why Choose Vacuum Servo Motor From Wheatstone?

compliant

Quality

Wheatstone is known for delivering high-quality products and services that meet or exceed our customers' expectations.

reliability

Reliability

Our products and services are designed to be reliable, which is why our customers trust us to provide them with solutions that work.

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Innovation

Wheatstone is always at the forefront of new technology and innovation, providing our partners with cutting-edge solutions that keep them ahead of the competition.

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Customization

We understand that every customer's needs are different, which is why we offer customized solutions that meet their specific requirements.

creativity

Experience

Wheatstone has been in the motor industry for many years, and our experience has helped us to develop a deep understanding of the challenges that our customers face.

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Global Reach

We have a strong global presence, with partners in over 70 countries, which enables us to provide our customers with support wherever they need it.

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Commitment to Service

Our commitment to providing exceptional service is at the heart of everything we do, and our partners appreciate the support we provide throughout the entire customer journey.

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Cost-effectiveness

Wheatstone offers cost-effective solutions that provide our customers with the best value for their investment, ensuring that they receive a high return on their investment.

Vacuum Servo Motor FAQ

Q Can vacuum servo motors be customized?

A
Yes. Vacuum servo motors can be customized in terms of torque, speed, voltage, encoder type, shaft design, materials, and vacuum rating to meet specific application requirements.
Q What applications require vacuum servo motors?

A
Vacuum servo motors are widely used in semiconductor manufacturing, vacuum coating systems, aerospace testing, scientific instruments, particle accelerators, and space simulation equipment.
Q What vacuum levels can vacuum servo motors operate in?

A Vacuum servo motors can be designed for different vacuum ranges, including low vacuum, high vacuum, and ultra-high vacuum . The achievable vacuum level depends on motor materials, lubrication method, and thermal design
Q Can standard servo motors be used in vacuum environments?

A
No. Standard servo motors are not suitable for vacuum environments because their lubricants, insulation materials, and coatings may outgas, overheat, or degrade. Vacuum servo motors are specifically engineered to address these issues.
Q What is a vacuum servo motor?

A
Vacuum Servo Motor is a precision-controlled motor designed to operate reliably in vacuum or low-pressure environments. It features special materials, insulation, lubrication, and sealing technologies to prevent outgassing and ensure stable performance where conventional motors would fail.